Title: Design and Fabrication of Planar Transmon Qubits
Abstract: In this talk, I will discuss the design, fabrication, and preliminary data of a superconducting transmon qubit. My qubit, in an effort to improve its coherence time, incorporates a thin film of aluminum grown by molecular-beam epitaxy on a silicon substrate. After patterning and etching the initial MBE aluminum layer via photolithography, a Josephson junction is added by electron-beam lithography, ion milling of the initial layer, and double angle evaporation of aluminum with an oxidation step. I will discuss current challenges that I have encountered during fabrication as well as some preliminary data at 20 mK of three independent qubits each coupled to their own resonator.